Potential Stable Low-Permeation Rate Standard Based on Micro-machined Silicon

Potential Stable Low-Permeation Rate Standard Based on Micro-machined Silicon

Silicon wafers with micro-machined holes were evaluated for use as low-permeation-rate standard artifacts. Accuracy, stability, and reliability were assessed. Two independent experimental techniques for evaluating permeation were used: chilled mirror hygrometer and mass loss. The wafers exhibited a well-defined linear relationship between hole area and resultant water partial pressure for both ...

Brain responses to micro-machined silicon devices.

Micro-machined neural prosthetic devices can be designed and fabricated to permit recording and stimulation of specific sites in the nervous system. Unfortunately, the long-term use of these devices is compromised by cellular encapsulation. The goals of this study were to determine if device size, surface characteristics, or insertion method affected this response. Devices with two general desi...

Oxidation smoothening of silicon machined micro- and nano-scale structures

A sensitive optical micro-machined ultrasound sensor (OMUS) based on a silicon photonic ring resonator on an acoustical membrane

With the increasing use of ultrasonography, especially in medical imaging, novel fabrication techniques together with novel sensor designs are needed to meet the requirements for future applications like three-dimensional intercardiac and intravascular imaging. These applications require arrays of many small elements to selectively record the sound waves coming from a certain direction. Here we...

Highly Compact Micro-machined Coplanar

Highly compact micro-machined coplanar bandpass filters based on end-coupled half-wavelength and quarter-wavelength resonators topologies have been investigated. Simple gap and interdigitated capacitive discontinuities have been modeled through an appropriate technique and have been implemented in order to achieve low loss and narrow bandpass membrane micromachined filters. Excellent performanc...